Improvement of spatial resolution by tilt correction in near-field scanning microwave microscopy

The limitation of mechanical manufacturing will result in a small tilt angle the sample stage horizontal direction, which decreases spatial resolution imaging near-field scanning microwave microscopy (NSMM). In this paper, we focus on correction and improve NSMM image. results electromagnetic simulation line scan measurement demonstrate critical parameters affecting sensitivity NSMM, such as length probe extending out cavity, tip–sample distance, tip apex size. images can rotate successfully to plane with methods, local average re-interpolation are applied denoise images. Experimental copper thin film grid, coin texture, lithography mask, leaf vein obtained. before after verify improvement all above methods.